PROJECTING EXPOSURE SYSTEM AND SCANNING EXPOSURE METHOD,申请号JP19970010375-传众专利搜索

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发明名称	PROJECTING EXPOSURE SYSTEM AND SCANNING EXPOSURE METHOD
摘要
申请公布号	JPH09190976(A)	申请公布日期	1997.07.22
申请号	JP19970010375	申请日期	1997.01.23
申请人	NIKON CORP	发明人	NISHI TAKECHIKA
分类号	G03F7/20;G03F7/207;H01L21/027;(IPC1-7):H01L21/027;G03B27/32;G03B27/54	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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