| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compact, inexpensive, highly sensitive sensor having good offset temperature characteristics, by forming a piezoelectric layer on a surface of a coupling layer of metal or metal oxide formed on a surface of a vibrating body, and setting a surface electrode layer on a surface of the piezoelectric layer. SOLUTION: A vibrating body 1 of a tuning fork structure is composed of a glass ceramic material primarily of SiO2 . A driving part 4 and a detecting part 5 set at vibrating arms 2, 3 are constituted of a coupling layer 6, a piezoelectric layer 7 and a surface electrode layer 8. The coupling layer 6 is a coupling layer of titanium formed by plating and serves also as a lower electrode layer. The coupling layer 6 is formed all over the surface of the vibrating body 1. The piezoelectric layer 7 is a piezoelectric layer of PZT formed by water heating and grown on the coupling layer 6. The surface electrode layer 8 is formed on the piezoelectric layer 7 by printing. The vibrating arms 2, 3 are vibrated in a breadthwise direction of the tuning fork by a piezoelectric driving force generated by the driving part. In this state, a Coriolis force is generated at a part having a vibration speed of the tuning fork. Vibrations by the force are detected by the piezoelectric operation of the detecting part. |
