| 摘要 |
PROBLEM TO BE SOLVED: To enable a chassis to stably travel without floating from the surface of a sample by increasing the attracting force of the chassis for the sample, providing guide rollers so that the chassis does not get skewed, and constructing the chassis so that it does not ride on a magnet rail. SOLUTION: When a chassis 7 travels, guide rollers 31 roll on the side faces of guide rails 30 placed on both sides of a magnet rail 2, so an inspecting device can travel along the rail 2 without being skewed. Since a flange 32 is pressed against the upper surface of the rail 30 by a third spring 34, the guide rollers 31 can be brought into rolling contact with the side faces of the rails 30 regardless of the size of the curvature of the surface to be inspected of the sample 1, so the chassis 7 can travel along the rail 2 without being skewed. |
