Vorrichtung zur Erzeugung von Plasmen mittels Mikrowellen

摘要

The invention relates to a device for the production of microwave plasmas with a microwave generator (1) and a wave guide resonator (5) which comprises a plasma chamber (7). The short side of the cross-section of the resonator (5) is turned to be parallel to the axis y and is in a common wall with the chamber (7). The microwave power from the resonator (5) is coupled into the chamber (7) at coupling points (6) in said short cross section side. The coupling points are preferably in the form of azimuthal slot couplers in the common wall of (5) and (7).