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发明名称
Vakuumbearbeitungsanlage
摘要
申请公布号
DE59306704(D1)
申请公布日期
1997.07.17
申请号
DE19935006704
申请日期
1993.02.04
申请人
BALZERS AG, BALZERS, LI
发明人
STRASSER, GREGOR, DR., FL-9490 VADUZ, LI;GOOD, PIUS, CH-8887 MELS, CH;STEINMANN, JUERG, CH-8880 WALENSTADT, CH;SCHERTLER, ROMAN, A-6922 WOLFURT, AT
分类号
B01J3/00;B01J3/02;B01J19/00;C09K3/10;C23C14/56;H01L21/00;H01L21/677;(IPC1-7):C23C14/56;F16K51/02
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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