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发明名称
Ablenksystem für einen Strahl geladener Teilchen
摘要
申请公布号
DE69125577(T2)
申请公布日期
1997.07.17
申请号
DE19916025577T
申请日期
1991.11.28
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
BETSUI, KEIICHI, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP
分类号
H01J37/09;H01J37/04;H01J37/12;H01L21/027;H01L21/30;(IPC1-7):H01J37/04;H01J37/147
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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