| 摘要 |
A method of detecting unwanted molecular structures in processes comprises the steps of imaging the process, cataloging unwanted molecular structures and on further imaging the process, applying the catalog of unwanted molecular structures to identify their presence in the process. The imaging and fault correcting device consisting of radiation emitter (1), filter(s) and/or field flattener(s) (2 and 4) and optics (5). A controller for the processes, not shown, comprises a known programmable computer including memory and a display performing "split screen" computer program control according to the method of the present invention. |
