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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2630288(B2)
申请公布日期
1997.07.16
申请号
JP19940338879
申请日期
1994.12.29
申请人
NIPPON DENKI KK
发明人
SUGAI KAZUMI
分类号
H01L21/3205;H01L21/205;H01L21/28;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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地址
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