| 摘要 |
PURPOSE:To make a stable laser operation possible by achieving stable discharge. CONSTITUTION:In an electrode 5 provided with a protruding part 5a projected to an electrode 6 opposed to the electrode 5, and the width of the protruding part 5a is made to substantially coincide with the discharge width. Furthermore, the two electrodes 5 and 6 are formed so as to satisfy the conditions x<d, x<W, 0.01<h/(W-x)<0.5, where x is the width of the protruding part 5a, h is the height of the protruding part 5a, d is the distance between the front end of the protruding part and the opposite electrode 6, and W is the width of the electrode 5 having the protruding part 5a. |
