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发明名称
MOSGATAHANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2629792(B2)
申请公布日期
1997.07.16
申请号
JP19880068416
申请日期
1988.03.23
申请人
SEIKOO EPUSON KK
发明人
TANAKA KAZUO
分类号
H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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