| 摘要 |
PURPOSE:To perform a highly accurate positioning operation at a high speed by providing a rough rotation driving mechanism and a vertically driving mechanism constituted by combining a pulse motor and gears, and fine rotation driving mechanism and a vertically driving mechanism using laminated piezo-electric element. CONSTITUTION:An object to be processed is brought onto a table 1 by suction of a vacuum pump. The positional deviation of the object in its rotating direction is first adjusted with relatively rough accuracy by moving a rotary plate 14 against a roof plate 23 by means of a rough rotation driving mechanism composed of a pulse motor and gears 37, 40, 41, etc. Then the table 1 is positioned by moving the table 1 with relative rough accuracy in the vertical direction against the roof plate 23 by means of a vertically moving mechanism composed of a pulse motor 27 and gears 31, 34, etc. Thereafter, the table 1 is highly accurately positioned in the rotating direction through a plate spring member 63 by giving a command voltage to a laminated piezo-electric element 69. Finally, the table 1 is accurately positioned in the vertical and oblique direction by giving a command voltage to a laminated piezo-electric element for vertical drive and moving the plate spring member 63 in the vertical and oblique directions. |
