发明名称 ICHIGIMESOCHI
摘要 A positioning device includes a movable table supported by a rectilinear guide mechanism or rotary mechanism, the movable table being moved by a driving mechanism so as to position a member, to be conveyed, placed on the movable table, with respect to a predetermined site. After the member being conveyed is conveyed to the predetermined site, the conveyed member is contacted intimately to a stationary table which provides a reference with respect to the attitude of the conveyed member, such that the attitude correction of the conveyed member is attained.
申请公布号 JP2631485(B2) 申请公布日期 1997.07.16
申请号 JP19880015859 申请日期 1988.01.28
申请人 KYANON KK 发明人 MIZUSAWA NOBUTOSHI;TANAKA YUTAKA;EBINUMA RYUICHI
分类号 G12B5/00;B23Q1/00;G03F7/20;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G12B5/00 主分类号 G12B5/00
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