首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH09186000(A)
申请公布日期
1997.07.15
申请号
JP19950353875
申请日期
1995.12.28
申请人
ANELVA CORP
发明人
TAKAGI KENICHI
分类号
H05H1/46;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Slider for a solid paste dispenser
High temperature powder metallurgy superalloy with enhanced fatigue and creep resistance
Packet communication system with QoS control function
Computer keyboard providing an alert when typing in Caps Lock mode
Routing architecture including a compute plane configured for high-speed processing of packets to provide application layer support
Semiconductor laser driving circuit and optical head
System and method for editing source content to produce an edited content sequence
Methods of redundancy in a floating trap memory element based field programmable gate array
Polycyclic guanine phosphodiesterase V inhibitors
Differential labeling for quantitative analysis of complex protein mixtures
Electronic torque wrench
Power source test instrument
Chromatographic or spectroscopic reports with hyperlinks to allow direct access to external references
Paper-feeding apparatus having a part to vary a paper-entering angle in an image forming apparatus
Reducing tester channels for high pinout integrated circuits
System and method for transitioning between engine device schedules based on engine operating condition
Programmable polarity for high speed differential interfaces
Multiplexing apparatus
Intelligent control for process optimization and parts maintenance
Die height adjusting device for pressing machine