| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric conversion element with a large conversion area and advantages in conversion efficiency, reliability for a long time, durability, deformation-resistance, and uniformity by providing ultraviolet cleaning of a conductive substrate in an oxgencontaining atmosphere before forming functional films an the substrate. SOLUTION: A cleaning step with irradiation of ultraviolet ray in an atmosphere including oxygen is carried out before functional films, such as a metallic layer 102 as a light reflective layer, a reflection amplifying layer 103, and semiconductor photovoltaic layers 104 to 106 made of silicon-atom-based non- monocrystal material, are formed. The ultraviolet ray is absorbed by the oxygen in the atmosphere to generate ozone. At the same time, the ultraviolet ray is absorbed also by contaminant and causes excitation to promote the decomposition through ozone. Then, a multiple effect is caused by these two factors, and the contaminant is decomposed into non-volatile materials and removed without a trouble of re-sticking. In addition, the adhesiveness between the conductive board and the metallic layer can be improved. |
