发明名称 APPARATUS FOR PRODUCING SILICON SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for producing a silicon single crystal suitable for producing the silicon single crystal of a large diameter sized >=8" diameter. SOLUTION: This apparatus is composed of a freely rotatable crucible for housing a silicon melt, a heater disposed to enclose the outer periphery of the crucible, electrodes for supplying a DC current to a heater, magnets for impressing magnetic fields horizontally to the silicon melt housed in the crucible and a freely rotatable pulling-up shaft for pulling up the silicon single crystal from the silicon melt. In such a case, the electrodes 7, 7' and the magnets 9, 9' are so arranged as to attain the state rotating at an angle larger then 0 deg. and smaller than 180 deg. in the counter clockwise direction from the state in which the direction of the magnetic lines of force running the center of the crucible and the direction of the current generated in the horizontal direction when the DC current is supplied to the heater 5 are aligned.
申请公布号 JPH09183691(A) 申请公布日期 1997.07.15
申请号 JP19950352211 申请日期 1995.12.28
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 HAYASHI TOSHIRO;HOSHI RYOJI;FUSEGAWA IZUMI;OTA TOMOHIKO
分类号 C30B15/00;C30B15/14;C30B15/30;C30B29/06;(IPC1-7):C30B15/14 主分类号 C30B15/00
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