发明名称 WIRE BONDING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To reduce a required time for setting and adjusting conditions by calculating and indicating the diameter of a ball. SOLUTION: A ball diameter calculator 16 receives a signal a indicating the diameter of a thin metal wire, signal d indicating a target value of the diameter of a ball, discharge current setting signal 9, output terminal voltage signal depending on the voltage value between output terminals 11 and 11a at the output of a high voltage detector 14a, and discharge start timing signal from a timing generator 12a and calculates the ball diameter on the basis of these input signals. An output signal of the calculator 16 is fed to a ball diameter indicator 17 to indicate the ball diameter. This eliminates the necessity for adjusting a bonding machine with repetition of settings of the discharge current and the time as well as measuring of the ball diameter by operators. And, if the gap length, i.e., the distance between the metal wire and torch electrode changes, a ball of a fixed diameter can be always formed.</p>
申请公布号 JPH09186188(A) 申请公布日期 1997.07.15
申请号 JP19950341800 申请日期 1995.12.27
申请人 TOSHIBA CORP 发明人 NAKAO MITSUHIRO
分类号 H01L21/60;B23K20/00;(IPC1-7):H01L21/60 主分类号 H01L21/60
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