| 摘要 |
PROBLEM TO BE SOLVED: To easily set a working position without damaging a specimen by moving by a movement data so that a specimen can be positioned on an ion beam irradiation position, to detect a display a secondary charged particle. SOLUTION: An ion beam 42, emitted from an ion gun 41, is focused on a focusing ion beam 44 by an ion optical system 43 to radiate, while scanning the work position of a specimen 1 on a specimen holder 2 placed on a work specimen stage 40. The work specimen stage 40 is moved, by input movement data, to the radiation position of a focusing ion beam 44 so that the specific region of the specimen 1 can be positioned. A secondary charged particle detector 46 detects a secondary charged particle 45, generated by the radiation of the ion beam 44, to display the strength signal of the charged particle 45 on a picture image display device 47. Moreover, organic compound vapor or an etching gas is splayed to the radiation position of the specimen 1 by a nozzle 48, to form a thin coat and remove the specimen surface. This can easily set a working position without damaging the specimen. |
