发明名称 Lead frame baking oven
摘要 A baking oven for heating lead frames used in the manufacturing of semiconductor devices including an oven main body having an entrance and an exit for lead frames, a heating device which creates a high-temperature atmosphere inside the oven main body, a lead frame magazine installed inside the oven main body so as to accommodate lead frames in a stacked fashion, a magazine mover which moves the lead frame magazine in a vertical direction, and a width adjustment device that changes the width of the lead frame magazine in a horizontal direction. The magazine mover and the width adjustment device are provided outside the oven main body for securing a high lead frame accommodation capacity and a longer heating time of the oven.
申请公布号 US5647740(A) 申请公布日期 1997.07.15
申请号 US19940335045 申请日期 1994.11.07
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 KOBARU, TETSUYA
分类号 H01L21/50;F27D3/00;H01L23/50;(IPC1-7):F27B9/14;F27B9/24 主分类号 H01L21/50
代理机构 代理人
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