发明名称 |
BIPOLAR TRANSISTOR MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a high speed element having a high collector current without deteriorating the performance about the initial voltage and punch- through. SOLUTION: An n-epitaxial region 15 to be a collector region is formed on a p-type substrate 11, In ions are implanted in the region 15 to form a base region 25 and an emitter region 33 adjacent to the base region 25 is formed. The base formed by doping In forms a high speed transistor having a narrow base. Owing to the imperfect ionization of the In dopant, an element having a high collector current without deteriorating the performance about the initial voltage and punch-through can be formed. |
申请公布号 |
JPH09186171(A) |
申请公布日期 |
1997.07.15 |
申请号 |
JP19960326323 |
申请日期 |
1996.12.06 |
申请人 |
LE-SENTO TECHNOL INC |
发明人 |
TOOMASU EDOWAADO HAMU;ISHIKU SHII KIJIRUYARI |
分类号 |
H01L29/73;H01L21/265;H01L21/331;H01L29/10;H01L29/167;H01L29/732 |
主分类号 |
H01L29/73 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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