| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric field type vacuum tube capable of using in severe environment such as high temperature, with no difference between individuals, and in which electron current varies by the outside force, and provide a pressure sensor and an acceleration sensor using this vacuum tube. SOLUTION: An electric field type vacuum tube is formed in such a way that an emitter made of a silicon thin film and having sharped tip, and a collector 13 are formed on a silicon substrate 11 through an oxide film 14, and a cap part comprising a second silicon thin film and an oxide film 18 are placed thereon through an oxide film 16. The silicon substrate 11 is used as a first gate and the second silicon thin film is used as a second gate, and voltage is applied between the emitter 12 and the silicon substrate 11 to emit electrons. When the outside force is applied to the cap part, current flowing to the collector 13 and the second gate varies, and therefore, the vacuum tube can be utilized as a pressure sensor. By using the whole current or the current to the first gate as reference, the individual difference can be erased. |
