Apparatus and method for generating position-dependent signals using a scanning plate having a plurality of differently configured scanning regions

摘要

In this apparatus, which serves preferably to generate reference pulses, graduations are provided on the scanner plate (A), whose graduation period varies steadily as a function of location (chirped grating). The various graduation markings (GS) are embodied in turn as periodic phase gratings, whose graduation scores extend parallel to the measurement direction (X).