| 摘要 |
PROBLEM TO BE SOLVED: To prevent stripping of a resist film from a machining surface by forming a jig with ceramics provided with a specific thermal conductivity and a low etching speed by Ar ion beam and thereby increasing the transmission efficiency of the chill. SOLUTION: A machining jig 1 for holding a work is formed with a square plate 2 while the placement base 2a is provided projectingly with plural ribs 3 at equal spaces apart. This square plate 2 is formed with ceramics having a thermal conductivity of 20W/mk or above and an etching speed of 1.2μm/hr or below by an Ar ion beam. As a result, the chill from cooling water circulating in the placement base 2a can be efficiently transmitted to the work. The chill also prevents the machining surface of the work from being heated to high temperature due to the collision of the Ar ion beams, protecting a resist film from stripping. Using the ion beam machining device in which this jig 1 is employed, the work can be machined with a high precision to submicron order. |
