| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the weight of a moving part and secure correct positioning accuracy with excellent responsiveness for starting and stopping by lowering the height of an XY table. SOLUTION: An intermediate saddle 2 is attached slidably in an X shaft direction on a base mount 1 through a first linear guide device 4, and also a table main body 3 is attached slidably in a Y shaft direction on the intermediate saddle 2 through a second linear guide device 5. A first linear motor 11 by which the intermediate saddle 2 is driven in the X shaft direction and a second linear motor 16 by which the table main body 3 is driven in the Y shaft direction are arranged. The stator 12 of the first linear motor 11 is arranged in the X shaft direction on the upper surface of the base mount 1, and also the stator 17 of the second linear motor 16 is arranged in the Y shaft direction on the lower surface of the table main body 3, and further, the movers 13, 18 of the first and second linear motors 11, 16 are arranged in the dead space of the intermediate saddle 2 by being perpendicular to each other and faced in opposite directions.</p> |
