| 发明名称 |
Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 摘要 |
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.
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| 申请公布号 |
US5648300(A) |
申请公布日期 |
1997.07.15 |
| 申请号 |
US19940344585 |
申请日期 |
1994.11.18 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAKAYAMA, MASARU;TAKAMATSU, OSAMU;YAGI, TAKAYUKI;YAMAMOTO, KEISUKE;KAWASAKI, TAKEHIKO;SHIMADA, YASUHIRO;SUZUKI, YOSHIO |
| 分类号 |
G01B7/34;B81B3/00;B81B7/02;B81C1/00;G01N37/00;G01Q10/04;G01Q60/10;G01Q60/16;G01Q70/06;G01Q70/08;G01Q70/16;G01Q80/00;G05D3/00;G11B5/48;G11B9/00;G11B9/14;H01L27/20;H01L29/84;(IPC1-7):H01L21/465 |
主分类号 |
G01B7/34 |
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