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发明名称
PRODUCTION OF DIAMOND SINGLE CRYSTAL THIN FILM AND PRODUCTION APPARATUS THEREFOR
摘要
申请公布号
JPH09183697(A)
申请公布日期
1997.07.15
申请号
JP19950342533
申请日期
1995.12.28
申请人
MITSUBISHI HEAVY IND LTD
发明人
NISHIMORI TOSHIHIKO
分类号
C30B25/20;C23C16/26;C23C16/27;C30B29/04;(IPC1-7):C30B29/04
主分类号
C30B25/20
代理机构
代理人
主权项
地址
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