HMDS SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To automatically regulate a flow of hexamethyldisilazane for preventing deterioration of productivity by providing an optical sensor having a light source and a light sensor sensing whether or not an indicator displaying a level of hexamethyldisilazane is located in a proper position so as to regulate a flow. SOLUTION: When a wafer is treated with hexamethyldisilazane(HMDS), when HMDS normally flows through a flowmeter 31 after an elapse of a prescribed time, a ball 37 in the flow meter 31 blocks an optical path between a light source 33 and an optical sensor 35. Accordingly, if light does not reach the optical sensor 35, a flow of HMDS normally operates. When an interception rate of light reaches 100%, a supply of HMDS is stopped so that HMDS may not flow excessively. On the other hand, when the interception rate of light gets 0% and the optical sensor 35 senses light, a photosensitive film application device is to be stopped.