发明名称 Method for manufacturing semiconductor nonvolatile memory device with field insulating layer
摘要 In a method for manufacturing a semiconductor memory device including a plurality of field areas, a plurality of electrode areas, a plurality of source areas and drain areas sunrounded by the field areas and the electrode areas, before forming field insulating layers for isolating the source and drain regions, impurities are introduced into the field areas between the source regions, to create an additional source region below the field insulating layer for isolating the source regions. The additional source regions are linked between the source regions.
申请公布号 US5648285(A) 申请公布日期 1997.07.15
申请号 US19950533966 申请日期 1995.09.26
申请人 NEC CORPORATION 发明人 ISHIGE, KIYOKAZU
分类号 H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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