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发明名称
TREATING METHOD
摘要
申请公布号
JPH09186096(A)
申请公布日期
1997.07.15
申请号
JP19970023080
申请日期
1997.02.06
申请人
HITACHI LTD
发明人
TAKAGAKI TETSUYA;NISHIZUKA HIROSHI;UCHINO TOSHIYUKI;TORII TAKUJI
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/22;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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