发明名称 Production of films and powders for semiconductor device applications
摘要 A process for chemical bath deposition of selenide and sulfide salts as films and powders employable as precursors for the fabrication of solar cell devices. The films and powders include (1) CuxSen, wherein x=1-2 and n=1-3; (2) CuxGaySen, wherein x=1-2, y=0-1 and n=1-3; (3) CuxInySen, wherein x=1-2.27, y=0.72-2 and n=1-3; (4) Cux(InGa)ySen, wherein x=1-2.17, y=0.96-2 and n=1-3; (5) InySen, wherein y=1-2.3 and n=1-3; (6) CuxSn, wherein x=1-2 and n=1-3; and (7) Cux(InGa)y(SeS)n, wherein x=1-2, y=0.07-2 and n=0.663-3. A reaction vessel containing therein a substrate upon which will form one or more layers of semiconductor material is provided, and relevant solution mixtures are introduced in a sufficient quantity for a sufficient time and under favorable conditions into the vessel to react with each other to produce the resultant salt being prepared and deposited as one or more layers on the substrate and as a powder on the floor of the vessel. Hydrazine is present during all reaction processes producing non-gallium containing products and optionally present during reaction processes producing gallium-containing products to function as a strong reducing agent and thereby enhance reaction processes.
申请公布号 AU1462197(A) 申请公布日期 1997.07.14
申请号 AU19970014621 申请日期 1996.12.13
申请人 MIDWEST RESEARCH INSTITUTE 发明人 RAGHU NATH BHATTACHARYA;ROMMEL NOUFI;LI WANG
分类号 H01L31/032 主分类号 H01L31/032
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