APPARATUS AND METHOD FOR MEASURING AN ION CURRENT

摘要

Disclosed is a method and apparatus to test ion current of magnetic field type. By the method, a magnet(11) is installed at inlet of a faraday cup(10) to form a magnetic field. An earth electrode plate(13) on which ion beam incidence hole is formed is installed at outside of the inlet of faraday cup(10). A current meter(12) is connected to the faraday cup(10) so that ion current is measured with pressing the secondary electrons by the magnetic field. Thereby, the apparatus is able to be simplified and integrated, and the accuracy of measuring value is improved.