发明名称 |
Reactor having an array of heating filaments and a filament force regulator |
摘要 |
An apparatus for adjusting the tension on a heating filament in a reactor used in carbon deposition on a substrate via chemical-vapor deposition is disclosed, as is a method for preventing breakage of the filaments during operation. The apparatus comprises a force regulator attached to an array of heating filaments. Preferably, the force regulator is adjustable and is adjusted prior to reactor operation and/or periodically or continuously as the filaments lengthen due to carburization in the carbon-vapor environment of the reactor. The adjustable force regulator attached to an array of filaments enables effective regulation of the force on a filament during reactor operation and provides an easily-maintained reactor with quick turn-around time between cycles of use. |
申请公布号 |
AU1352397(A) |
申请公布日期 |
1997.07.14 |
申请号 |
AU19970013523 |
申请日期 |
1996.12.19 |
申请人 |
SP3, INC. |
发明人 |
JAMES E. HERLINGER;DAVID K. STUDLEY;JERRY W. ZIMMER |
分类号 |
C23C16/14;C23C16/27;C23C16/44 |
主分类号 |
C23C16/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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