| 摘要 |
An angular velocity sensor has a flexible substrate and an opposed, fixed substrate supported at their peripheries by a sensor casing. An oscillator is fixed on the lower surface of the flexible substrate. Five lower electrodes are formed on the upper surface of the flexible substrate. Five upper electrodes are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. For sensing an angular velocity about the X-axis, an a.c. voltage is applied across a predetermined pair of the opposed electrodes to cause the oscillator to oscillate in the Z-axis direction, whereby a Coriolis force proportional to the angular velocity is applied to the oscillator to displace it in the Y-axis direction. As a result, the distance between the opposed electrodes in the positive Y-axis direction becomes smaller, and the distance between the opposed electrodes in the negative Y-axis direction becomes greater, which changes their capacitances to detect the Coriolis force and, thereby, determine angular velocity. It is similarly possible to detect angular velocities about the Y-axis and the Z-axis.
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