| 摘要 |
<p>PROBLEM TO BE SOLVED: To measure a position with high accuracy by cutting off a high frequency component of vibration among reaction force of a stage being driven. SOLUTION: A mechanical filter 3 is arranged between a motor 1 and a base part 2, and vibration of a specific frequency area in reaction force of a stage 4 is prevented from propagating to a body 5 through the motor 1 and the base part 2. Another mechanical filter is composed of a slidingly movable part to slidingly move in the moving direction of a spring, a damper and the stage.</p> |
