发明名称 |
Interferometric detecting/imaging method based on multi-pole sensing |
摘要 |
A method for detecting and/or imaging a workpiece. In a detection aspect, the method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe tip and the workpiece; decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information; and, using the decoding information as a means for detecting the presence of the workpiece. In an imaging aspect, the method includes incorporating the previous steps in a scanning operation for developing an image representative of the workpiece.
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申请公布号 |
US5646731(A) |
申请公布日期 |
1997.07.08 |
申请号 |
US19950511166 |
申请日期 |
1995.08.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
WICKRAMASINGHE, HEMANTHA KUMAR;ZENHAUSERN, FREDERIC;MARTIN, YVES;O'BOYLE, MARTIN PATRICK |
分类号 |
G01N37/00;G01Q30/02;G01Q60/18;(IPC1-7):G01B9/02 |
主分类号 |
G01N37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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