| 摘要 |
PROBLEM TO BE SOLVED: To reduce the quantity of soot sticking to an IC package. SOLUTION: A cylinder 200 is arranged between a convex lens 107 above an IC package 108b and that package 108b. The cylinder 200 is constituted of three parts 202a, 202b and 202c, with the part 202b equipped with an exhaust port 204. In addition, the cylinder 200 is equipped with a pin hole plate 203 on an optical axis 110 away from the IC package 108b across the position closest to the exhaust port 204. Further, the exhaust port 204 is provided with a fan 205, which is actuated during the laser operation, sucking the air inside the cylinder 200. |
