| 摘要 |
PROBLEM TO BE SOLVED: To enable the easy handling of treating members having heavy weight, a high temperature, etc., in a single crystal pull-up apparatus, by constructing mechanical mechanism carrying out the vertical motion, rotation and horizontal movement of the members. SOLUTION: After a stopper pin 15 is pulled out from a stopper hole 14 of a lifting device 1, a movable vertical member 12 is opened outside around a hinge 13, and engaging pins 16, 16 of a fixed vertical member 11 are engaged into pin holes 104H, 104H of a graphite crucible 104. Subsequently, the movable vertical member 12 is rotated toward inner side, and engaging pins 17, 17 are engaged into the pin holes 104H, 104H of the crucible 104. Then, the stopper pin 15 is engaged into the stopper hole 14 to fix the movable vertical member 12. Subsequently, a wind-up chain 44 of a crane apparatus 4 is fixed in chain holes 10H, 10H of a horizontal member 10, a hook 43 at the lower end of the wind-up chain 44 is passed into a ring 44R, and a wind-up actuator 41 is driven to lift up the crucible 104. Then, a rotation actuator 45 is driven to rotate an arm part 40 and the crucible 104 is made to turn toward a desired direction. |
