| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize the size of an apparatus itself, reduce the running cost and always obtain high purity gaseous N2 as a product at a passing very low temp. gaseous N2 produced in a mixer through the inside of an adsorbent while maintaining the very low temp. to adsorb and remove O2 and CO. SOLUTION: The temp. of very low temp. gaseous N2 is always measured with a thermometer 15. Control valves 13, 14 are opened or closed through a controller 16 on the basis of the measured results and the mixing ratio between gaseous N2 and liquefied N2 is regulated so as to maintain a specified constant temp. Very low temp. gaseous N2 is blown at the constant temp. into an adsorption tube 17 through a valve 23a or 23b and it is passed through the inside of an adsorbent while maintaining the very low temp. to selectively adsorb and remove O2 and CO as impurities. The resultant high purity gaseous N2 is blown into a heat exchanger 18 through a valve 23c or 23d, heated to ordinary temp. discharged from a discharge pass 25 and used.</p> |
