| 摘要 |
PROBLEM TO BE SOLVED: To record work data by warning an operator of a process condition, and electronically monitoring work in a process in order to compensate inaccuracy of manual operation. SOLUTION: In order to monitor work of a wet hood 10, infrared ray detectors are placed on tanks 12, 14, 16, 18, 20 and 22, and detecting zones 54, 56, 58, 60, 62 and 64 are established. When wafer boards enter the detecting zones, a computer-controller 78 starts a timer by receiving a signal from a detector, and sends the signal to an output device, and shows that the tanks enter a specific detecting zone. A timer value and a prescribed process time value are compared with each other, and when the timer value approaches this prescribed process time value, a signal is sent to the output device such as an operator console 82, and the fact that work time approaches is shown. When the wafer boards are manually taken out of the tanks, actual time gathered in the tanks is stored as history data. |
