发明名称 |
ELECTROSTATIC CLAMP WITH LIP SEAL FOR CLAMPING SUBSTRATES |
摘要 |
An electrostatic clamping apparatus with lip seal for holding substrates in a vacuum processing chamber. The apparatus includes an electrostatic clamp, a sealing member surrounding the electrostatic clamp, and an edge ring surrounding the sealing member and holding the sealing member in place against the electrostatic clamp. The sealing member provides a seal between the electrostatic clamp and the substrate. This seal prevents the leakage of temperature control gas into the processing chamber and prevents process gas from reaching the electrostatic clamp and/or causing arcing in the chamber. In addition, by leaving a small gap between the sealing surface of the resilient sealing member and the edge of the electrostatic clamp, a helium distribution channel is created outside the electrostatic clamp top surface thus maximizing available contact area between the substrate and the clamp.
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申请公布号 |
WO9723898(A1) |
申请公布日期 |
1997.07.03 |
申请号 |
WO1996US20027 |
申请日期 |
1996.12.18 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
MARASCHIN, ROBERT;SHUFFLEBOTHAM, PAUL, KEVIN;BARNES, MICHAEL, SCOTT |
分类号 |
B25J15/06;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
B25J15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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