发明名称 |
PROCESS FOR PRODUCING ORGANICALLY MOFIFIED OXIDE, OXYNITRIDE OR NITRIDE LAYERS BY VACUUM DEPOSITION |
摘要 |
According to the invention, in plasma-activated high-rate evaporation of an oxide former, monomers are applied in addition to oxygen in such a way that the evaporated oxide formers and the oxygen and the monomers have a preferential direction on the substrate and pass through a high-density plasma zone. More than 50 wt % of the coating on the substrate consists of inorganic molecules and under 50 wt % of partially cross-linked organic molecules. The process is used for packaging, window glazing, mirrors, decorative surfaces or façade linings. |
申请公布号 |
WO9723661(A2) |
申请公布日期 |
1997.07.03 |
申请号 |
WO1996DE02434 |
申请日期 |
1996.12.13 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWAND;NEUMANN, MANFRED;SCHILLER, SIEGFRIED;MORGNER, HENRY;SCHILLER, NICOLAS;STRAACH, STEFFEN |
发明人 |
NEUMANN, MANFRED;SCHILLER, SIEGFRIED;MORGNER, HENRY;SCHILLER, NICOLAS;STRAACH, STEFFEN |
分类号 |
C23C14/00;C23C14/08;C23C14/32 |
主分类号 |
C23C14/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|