A monolithic piezoelectric actuator is made of stoichiometric PZT ceramics (2) with low A-site doping and silver- and palladium-containing electrode layers (1). The piezoelectric actuator has improved mechanical resistance and good piezoelectric properties. The disclosed production process leads to optimum grain sizes and optimum piezoelectric properties, independently from B-site doping, and makes it possible to produce multilayer piezoelectric actuators which can be used at high temperatures of up to 150 DEG C.
申请公布号
DE19615695(C1)
申请公布日期
1997.07.03
申请号
DE1996115695
申请日期
1996.04.19
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
CRAMER, DIETER, DIPL.-ING. (FH), 83607 HOLZKIRCHEN, DE;HELLEBRAND, HANS, DIPL.-PHYS., 81669 MUENCHEN, DE;LUBITZ, KARL, DIPL.-PHYS. DR.RER.NAT., 85521 OTTOBRUNN, DE
