PERMANENT MAGNET FOR ULTRAHIGH VACUUM APPLICATION AND METHOD FOR MANUFACTURING THE SAME

摘要

A permanent magnet for ultrahigh vacuum applications, made of a compact material that is superior in the adhesion to oxide coating and free from gas emission, which has suitable magnetic properties for an undulater used in an ultrahigh vacuum atmosphere below 1x10<-9> Pa. A method of manufacturing the permanent magnet, comprising the steps of cleaning an Fe-B-R magnet by ion sputtering; coating the magnet with a Ti film by ion plating; and covering the Ti film with an N-diffused layer or an aluminum layer by ion plating, the N-diffused layer being a TiNx layer (x = 0 to 1) formed in an Ar-N2 atmosphere under specific conditions so that the nitrogen concentration of the diffused layer may gradually increase. The aluminum layer is covered with an AlN or Ti1-xAlxN film by reactive ion plating in an N2 atmosphere. The magnet has superior magnetic properties while it is prevented from causing gas emission.