| 摘要 |
The invention concerns methods of vaporizing metal by means of a resistance-heated vaporizer boat (5), and such a resistance-heated vaporizer boat (5) for carrying out these methods. According to the invention, a reduced temperature is generated in the edge region (17), i.e. along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity (14) necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapour-deposited are attained. |
