发明名称 |
A single crystal growing apparatus |
摘要 |
<p>In a single crystal growing apparatus which pulls a semiconductor single crystal rod 14 from a semiconductor melt 13 contained in a quartz crucible 5 to grow the semiconductor single crystal, quartz crucible 5 is designed such that it can move up and down so as to maintain the level of semiconductor melt 13 constant and a main heater 7 which can move up and down and a subheater 10 which can move up and down are provided to heat semiconductor melt 13 so that the thermal environment of semiconductor melt 13 is maintained substantially constant. <IMAGE></p> |
申请公布号 |
EP0781868(A2) |
申请公布日期 |
1997.07.02 |
申请号 |
EP19960120852 |
申请日期 |
1996.12.23 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
YAMAGISHI, HIROTOSHI;TAKANO, KIYOTAKA;KIMURA, MASANORI |
分类号 |
C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/14 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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