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发明名称
Forming dielectrics in semiconductor devices
摘要
申请公布号
EP0537001(B1)
申请公布日期
1997.07.02
申请号
EP19920309176
申请日期
1992.10.08
申请人
SAMSUNG ELECTRONICS CO. LTD.
发明人
KIM, CHANG-GYU;CHOI,JI-HYUN
分类号
H01L21/3205;H01L21/3105;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/3205
代理机构
代理人
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地址
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