Fluorescence X-ray analyzer

摘要

Fluorescent X-ray analyzer characterized by leading a primary X-ray generated by an X-ray generator (2) into an X-ray irradiation area (6) by an X-ray guide tube (4), emitting the primary X-ray to a sample (10) on a sample stage (9) through an opening (8) formed in an X-ray shield wall (7) disposed in the X-ray irradiation area (6) and detecting the fluorescent X-ray generated at this time by an X-ray detector (11), wherein a resin film (18) of low X-ray absorption rate is stretched in the opening (8) to divide into a first space (19) comprising the X-ray guide tube (4) and X-ray detector (11) and a second space (20) comprising the sample stage (9).