发明名称 |
Method for manufacturing a flat-panel display |
摘要 |
A liquid crystal display having a gate insulating film of whose dielectric constant is a high and exhibits excellent leakage characteristics, includes a plurality of gate wirings formed on the transparent substrate, a plurality of signal lines arrayed to intersect the plurality of gate wirings, a plurality of switching devices located at the point of intersection between the respective gate wirings and signal lines. The switching device comprises a gate electrode constituted by aluminum or an aluminum alloy and a gate insulating film inserted between the channels of switching devices and the gate electrode. The gate insulating film has a first anodic oxide film constituted by aluminum or an aluminum alloy and a second anodic oxide film constituted by tantalum or a tantalum alloy. In the manufacturing method thereof, metals, aluminum or tantalum, are simultaneously anodically oxidized so as to suppress a hillock. An insulating layer having a high dielectric constant can be easily obtained while a leakage current characteristic is strengthened and its breakdown voltage is improved. A glass substrate can be protected since second and third anodic oxide films (Ta2O5) are formed on the entire surface of the substrate.
|
申请公布号 |
US5643817(A) |
申请公布日期 |
1997.07.01 |
申请号 |
US19940241856 |
申请日期 |
1994.05.12 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, KYUNG-SEOB;KIM, CHI-WOO;KWEON, YOUNG-CHAN;CHANG, WON-KIE |
分类号 |
G02F1/136;G02F1/1333;G02F1/1368;H01L21/316;H01L21/336;H01L21/77;H01L21/822;H01L21/84;H01L27/04;H01L29/78;H01L29/786;(IPC1-7):H01L21/786 |
主分类号 |
G02F1/136 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|