Pellicle structure and process for preparation thereof with dissolution of coating layer

摘要

A pellicle structure comprises a frame having a vertical through opening and a pellicle film spread on the upper the upper end of the opening of the frame. The pellicle film has a coating layer comprising a coating agent formed at least on the inner surface thereof, and a bonding portion for bonding the end edge of the frame to the peripheral edge of the pellicle film through an adhesive layer. The coating agent, in the bonding portion, is dissolved or dispersed in the adhesive so that the pellicle substrate is directly contacted by and bonded to the adhesive. In forming this pellicle structure, an adhesive, capable of dissolving therein the coating agent which comprises the coating layer, is coated on the top end of the opening of the frame; the adhesive is contacted with the coating layer on the surface of the pellicle substrate, whereby the coating agent dissolves in the adhesive allowing direct contact of the adhesive with the pellicle substrate; and the adhesive is then cured, whereby the pellicle substrate is directly bonded to the frame without interposition of the coating layer.