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发明名称
LAYER INSULATING FILM
摘要
申请公布号
JPH09172010(A)
申请公布日期
1997.06.30
申请号
JP19960356231
申请日期
1996.12.24
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
YAMAZAKI SHUNPEI;ITO KENJI
分类号
H01L23/522;H01L21/31;H01L21/316;H01L21/768;(IPC1-7):H01L21/316
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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