SEMICONDUCTOR TEST DEVICE, SEMICONDUCTOR TEST CIRCUIT CHIP AND PROBE CARD

摘要

The present invention comprises a plurality of semiconductor testing circuit chips 2 having an exclusive function of testing a plurality of one item of semiconductor integrated-circuit chips 1, a computer 3 for controlling the semiconductor testing circuit chips 2 and for collecting the test results, and a motherboard 4 on which the plurality of chips 1 to be tested and the plurality of testing circuit chips 2 are mounted so that the chips 1 to be tested are connected to the testing circuit chips 2. Since the major testing functions are incorporated into the testing circuit chips 2, the computer 3 for collecting the test results can sufficiently be composed of a low-price computer, so that it is possible to greatly lower the price of the semiconductor testing apparatus. By increasing the number of the testing circuit chips 2, it is possible to greatly increase the number of chips which can be tested simultaneously. Consequently, there can be provided a semiconductor testing apparatus which realizes the reduction in price and the increase in number of the semiconductor integrated circuits tested simultaneously, thereby significantly reducing the cost of testing the semiconductor integrated circuits.